| DONLAN, Renee ACTIVE | Secretary | 01 Jun 2026 | | | | Mks Inc., 2 Tech Drive, Andover, Massachusetts, 01810, United States |
| BELL, Alan John Lawson ACTIVE | Director | 10 Mar 2023 | | United States | June 1964 | 2, Tech Drive, Andover, Ma 01810, 01810, United States |
| FOXALL, Geoffrey Frederick ACTIVE | Director | 29 Mar 2016 | | England | November 1960 | Units 3-4 Cowley Way, Weston Road, Crewe, Cheshire, CW1 6AG, England |
| SABHARWAL, Mandeep ACTIVE | Director | 16 Nov 2022 | | United States | July 1970 | 2, Tech Drive, Andover, Massachusetts 01810, United States |
| ATTWOOD, Mark RESIGNED | Secretary | | 14 Nov 1995 | | | 3 Back Cross Lane, Congleton, Cheshire, CW12 3HT |
| BURKE, Kathleen Flaherty RESIGNED | Secretary | 15 Apr 2005 | 01 Jun 2026 | | | 8 Girard Road, Winchester, Ma 01890, United States |
| CHUTE, Richard RESIGNED | Secretary | 31 Jul 2000 | 15 Apr 2005 | | | 108 Brattle Street, Cambridge, Massachussets Ma02138, United States |
| DENT, Michael John RESIGNED | Secretary | 14 Nov 1995 | 31 Jul 2000 | | | 16250 Jackson Oaks Drive, Morgan Hill, California, 95037, Usa |
| ATTWOOD, Mark RESIGNED | Director | | 01 Jul 1998 | | August 1957 | 3 Back Cross Lane, Congleton, Cheshire, CW12 3HT |
| BAGSHAW, Seth Holmes RESIGNED | Director | 30 Mar 2009 | 03 Jun 2016 | United States | November 1959 | 5 Bayns Hill Road, Boxford, Massachusetts 01921, Usa |
| BERTUCCI, John RESIGNED | Director | 31 Jul 2000 | 15 Apr 2005 | | March 1941 | 50 Hill Street, Lexington, Massachusetts, 02173, Usa |
| BURKE, Kathleen RESIGNED | Director | 14 Jan 2019 | 14 Jun 2019 | United States | February 1965 | Mks Instruments Inc, 2 Tech Drive Suite 201, Andover, Massachusetts, United States |
| CHENNELL, Christopher RESIGNED | Director | | 30 Nov 1991 | | January 1955 | 26356 Vintage Woods Road, Apartment 12k Ei Torro California 92630, FOREIGN, Usa |
| CHUTE, Richard RESIGNED | Director | 31 Jul 2000 | 15 Apr 2005 | | May 1938 | 108 Brattle Street, Cambridge, Massachussets Ma02138, United States |
| D'ANTILIO, Derek RESIGNED | Director | 01 Mar 2011 | 18 Dec 2018 | United States | March 1972 | 13, Valente Drive, Worcester, Matts, Usa, MA 01604 |
| DENT, Michael John RESIGNED | Director | 23 Mar 1994 | 31 Jul 2000 | | March 1946 | 16250 Jackson Oaks Drive, Morgan Hill, California, 95037, Usa |
| MARTIN, David Henry RESIGNED | Director | 14 Jun 2019 | 16 Nov 2022 | United States | July 1954 | 2, Tech Drive, Suite 201, Andover, Massachusetts, 01810, United States |
| MURDOCH, Alan James RESIGNED | Director | | 30 Sep 1999 | | January 1942 | 19 Camborne Close, Congleton, Cheshire, CW12 3BG |
| PATERSON, Alan John Francis, Dr RESIGNED | Director | 14 Oct 1996 | 31 Jul 2000 | | May 1949 | 4 Hayfields Grove, Audlem, Crewe, Cheshire, CW3 0LB |
| ROBINSON, Timothy Roger RESIGNED | Director | 15 Apr 2005 | 30 Apr 2009 | England | February 1960 | Toms Cabin Swanley Lane, Burland, Nantwich, Cheshire, CW5 8QB |
| ROBINSON, Timothy Roger RESIGNED | Director | 23 Mar 1994 | 31 Jul 2000 | England | February 1960 | Toms Cabin Swanley Lane, Burland, Nantwich, Cheshire, CW5 8QB |
| SCHOFIELD, Judith Wendy RESIGNED | Director | 01 Jul 1998 | 31 Jul 2000 | | March 1944 | 1 Grenadier Close, Trentham, Stoke On Trent, Staffordshire, ST4 8XA |
| TAYLOR, Edward Frederick RESIGNED | Director | | 11 May 1995 | | December 1945 | 222 Washway Road, Sale, Cheshire, M33 4RA |
| TOCCI, Joseph M RESIGNED | Director | 15 Apr 2005 | 30 Mar 2009 | | July 1954 | 29 Drew Road, Belmont, Ma 02478, Usa |
| WEIGNER, Ronald C RESIGNED | Director | 02 Mar 2010 | 01 Mar 2011 | Usa | November 1945 | 55, Surrey Lane, Sudbury, Massachussets, MA01776, Usa |
| WEIGNER, Ronald C RESIGNED | Director | 31 Jul 2000 | 01 Mar 2011 | Usa | November 1945 | 55 Surrey Lane, Sudbury, Massachussets Ma 01776, United States |